Three-axis piezoresistive accelerometer with adjustable axial resolutions

نویسندگان

  • Bui Thu Hang
  • Tran Duc Tan
  • Chu Thi
  • Phuong Dung
  • Chu Duc Trinh
چکیده

A three-axis piezoresistive accelerometer which has adjustable resolutions to three axes was developed using MicroElectroMechanical Systems (MEMS) technology. This sensor made of a heavy proof mass and four long beams is to obtain high resolutions by reducing resonance frequencies. Adjustable resolution with small cross axis sensitivity could be obtained by a three-dimensional sensor structure.

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تاریخ انتشار 2013